A Fully-Numerical Environment for Evaluating the Robustness of the Short Open Load Calibration for Capacitance Measurements in Scanning Microwave Microscopy
- Resource Type
- Conference
- Authors
- Richert, D.; Kaja, K.; Moran-Meza, J. A.; Gautier, B.; Deleruyelle, D.; Piquemal, F.
- Source
- 2023 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO) Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO), 2023 IEEE MTT-S International Conference on. :133-135 Jun, 2023
- Subject
- Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Microwave measurement
Impedance measurement
Shape
Shape measurement
Electrostatic measurements
Capacitance
Capacitance measurement
SMM
FEM-simulations
tip apex geometry
self-calibration
- Language
- ISSN
- 2575-4769
Numerous experimental parameters affect the accuracy of impedance measurements in scanning microwave micro-copy (SMM). Investigating their effects on the measured values is particularly challenging. Here, we present the development of a fully-numerical FEM-based environment as a digital-twin to the actual measurements in SMM. We demonstrate the application of a self-calibration procedure for the simulated measurements with a maximal deviation of ± 6 % relative to reference capacitances determined via electrostatic calculations. Furthermore, we show the possibility to simulate the effects of the tip apex geometry on the simulated SMM measurements.