A simplified process flow for silicon heterojunction interdigitated back contact solar cells: Using shadow masks and tunnel junctions
- Resource Type
- Conference
- Authors
- Herasimenka, Stanislau Y.; Tracy, Clarence J.; Dauksher, William J.; Honsberg, Christiana B.; Bowden, Stuart
- Source
- 2014 IEEE 40th Photovoltaic Specialist Conference (PVSC) Photovoltaic Specialist Conference (PVSC), 2014 IEEE 40th. :2486-2490 Jun, 2014
- Subject
- Components, Circuits, Devices and Systems
Photovoltaic cells
Silicon
Plasmas
Heterojunctions
Strips
Films
silicon heterojunction
interdigitated back contact
solar cell
contact formation
- Language
- ISSN
- 0160-8371
A novel process flow, which can allow the formation of interdigitated p- and n-type a-Si strips and corresponding transparent conductive oxide (TCO) and metal layers for silicon heterojunction interdigitated back contact (SHJ-IBC) solar cells using only a single alignment step and without using any resist patterning is presented. The flow is based on the deposition of a-Si, TCO and metal layers through a stack of shadow masks. Three variation of the flow are described. Several key process components to include a-Si deposition and H 2 plasma etch through the shadow mask are demonstrated and described.