Wake-Up IoT Wireless Sensing Node Based on a Low-G Threshold mems Inertial Switch with Reliable Contacts
- Resource Type
- Conference
- Authors
- Ghosh, Sagnik; Goh, Duan Jian; Koh, Yul; Sharma, Jaibir; Da Toh, Wei; Chen, Weiguo; Zhang, Yao; Ng, Eldwin; Lal, Amit; Lee, Joshua E.-Y.
- Source
- 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :491-494 Jan, 2023
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Micromechanical devices
Wireless communication
Fabrication
Wireless sensor networks
Contacts
Switches
Tin
Low-g MEMS inertial switch
Event-driven zero-power IoT systems
switch contact time
Titanium Nitride (TiN) contact
zero-power sensor switch fabrication platform
- Language
- ISSN
- 2160-1968
We demonstrate a wireless sensing node (WSN) that is woken-up by a Microelectromechanical systems (MEMS) inertial switch with low-g threshold of 9.4g for Internet-of-Things (IoT) applications based on zero-power event-driven sensing. By virtue of the device design and fabrication of the switch contacts, the inertial switch in the WSN maintains a contact time long enough to wake up a Bluetooth Low Energy (BLE) module. Upon wake-up, the BLE module initiates data transmission to a remote display, when the WSN senses an external acceleration above the threshold. We also demonstrate remarkable contact reliability in the MEMS inertial switch as a significant step towards long lifetime zero-power sensors. The inertial switch output shows little degradation even after 100 cycles of testing under ambient conditions with an unpackaged MEMS device; a notable first among MEMS inertial switches.