10th International Conference on Vacuum Microelectronics Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International. :494-498 1997
Subject
Components, Circuits, Devices and Systems Engineered Materials, Dielectrics and Plasmas Fields, Waves and Electromagnetics Electron emission Plasma temperature Annealing Plasma measurements Hydrogen Plasma applications Voltage Amorphous materials Surface treatment Coatings