Reduced Order Modeling of Piezoelectric Resonators with Multi-Frequency Impedance Estimation
- Resource Type
- Conference
- Authors
- Chen, Kuan-Ting; Hsu, Tzu-Hsuan; Wu, Guan-Lin; Li, Ming-Huang
- Source
- 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :585-588 Jun, 2023
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Robotics and Control Systems
Micromechanical devices
Three-dimensional displays
Transducers
Estimation
Harmonic analysis
Frequency response
Finite element analysis
Reduced order model
finite element method
piezoelectric
resonator
LNOI SH-SAW
- Language
- ISSN
- 2167-0021
In this work, we investigate numerical simulation techniques to generate accurate reduced order models (ROM) in predicting the frequency response of piezoelectric microelectromechanical systems (MEMS) resonators. The ROM converts normalized modal parameters and electromechanical conversion factors (Γ n ) for different eigenmodes extracted from a finite element method (FEM) model into a multi-branch modified Butterworth-van Dyke (mBVD) circuit. A multi-frequency impedance estimation (MFIE) technique is proposed to enhance the accuracy of the ROM by running harmonic simulation at specific frequency points to accurately extract the motional impedance (R m ) and mechanical quality factors (Q m ) for each mode. The proposed method is verified via a shear-horizontal surface acoustic wave (SH-SAW) resonator based on thin-film lithium niobate-on-insulator (LNOI) topology. Compared with 3D FEM harmonic simulations, the ROM shows an error within +2/-7 dB over a 300 MHz span while shortening the computation time by 14.3 times. The proposed MFIE technique can further reduce the ROM error down to ±2 dB over the same span and provide predictions of the spurious modes that corresponds well to the measured results.