Protection Schemes for Plasma Induced Damage from Well-Side Antennas
- Resource Type
- Conference
- Authors
- Kuo, Hsi-Yu; Chu, Yu-Lin; Dai, Hung-Da; Wang, Chun-Chi; Lin, Pei-Jung; Guo, Ethan; Su, Yu-Ti; Hsu, Chia-Lin; Chen, Kuan-Hung; Chen, Tsung-Yuan; Lu, Ryan; Liang, Victor; Chen, Kuo-Ji; Xia, Kejun
- Source
- 2023 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2023 IEEE International. :1-5 Mar, 2023
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Engineering Profession
MOSFET
Electric potential
Metals
Logic gates
Routing
Plasmas
Clamps
PID
Well Charging
Well-side antennas
DNW
NBL
Cross-domain interface
- Language
- ISSN
- 1938-1891
In this paper, several protection schemes for the plasma-induced damage (PID) from well-side antennas are proposed. The PID protection components made of diodes or ESD-like clamps are used to either balance the potentials between the wells or clamp the gate-to-source voltages of the victim gates. These protection schemes and the way to insert protection components have been verified by a variety of test structures designed in a 0.13µm BCD (Bipolar-CMOS-DMOS) process where NBL (N-type Buried Layer) is used as the isolation well.