Integrated sensor based on a-Si:H photodiodes and diffused glass waveguides for biomedical applications
- Resource Type
- Conference
- Authors
- de Cesare, G.; Asquini, R.; Buzzin, A.; d'Alessandro, A.; Nascetti, A.; Caputo, D.
- Source
- 2017 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2017 Conference on. :1-2 May, 2017
- Subject
- Fields, Waves and Electromagnetics
General Topics for Engineers
Photonics and Electrooptics
Optical waveguides
Indium tin oxide
Optical device fabrication
Optical surface waves
Glass
Biomedical optical imaging
Optical sensors
- Language
We present the design and fabrication of an evanescent waveguide sensor based on a-Si:H photodiodes for biomedical applications. The complete device presents a noise level lower than 2fA and a responsivity of 300mA/W at 532nm.