Room-tempearutre CO2 sensing based on interdigitated capacitors and resonant cantilevers
- Resource Type
- Conference
- Authors
- Kim, Choongsoon; Getz, Patrick; Kim, Min-gu; Brand, Oliver
- Source
- 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :1532-1535 Jun, 2017
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Temperature sensors
Resonant frequency
Temperature
Carbon dioxide
Humidity
Temperature measurement
Resonant cantilever
Capacitive sensor
CO2
Amino
- Language
- ISSN
- 2167-0021
This paper compares a MEMS-based resonant cantilever and an interdigitated capacitor, both coated with an amino-functionalized sensing film, as room temperature carbon dioxide (CO 2 ) detectors. The sensor sensitivities at room temperature to CO 2 are assessed as well as their cross-sensitivities to temperature and humidity. The effectiveness of an uncoated reference cantilever for temperature compensation is demonstrated, reducing the temperature sensitivity of the system by a factor of 300.