This paper introduces Glass-MEMS with high aspect ratio features processed by Laser Induced Deep Etching (LIDE) for the first time, highlighting their potential to bridge the gap between state-of-the-art microsystem technology and macro-mechanical systems. The study reveals the fabrication capabilities of various micromechanical components important to MEMS, including springs, cavities, and electrostatic comb actuators. Functionality and reliability tests were carried out. Force-displacement measurements were performed on various micromechanical glass systems and compared with finite element method (FEM) predictions. The results show a remarkable agreement of identified critical stress areas and an estimated maximum breaking strength of ~1GP of 30 µm × 260 µm glass springs highlighting the robustness and potential of these Glass-MEMS structures.