Photoconductive Switching of a High-Voltage Actuator Array
- Resource Type
- Conference
- Source
- 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) Micro Electro Mechanical Systems Conference (MEMS), 2022 IEEE 35th International Conference on. :220-222 Jan, 2022
- Subject
Bioengineering Components, Circuits, Devices and Systems Fields, Waves and Electromagnetics Photonics and Electrooptics Power, Energy and Industry Applications Micromechanical devices Actuators Three-dimensional displays Conferences Wires Switches Control systems Voltage control actuators photoconductor photocontrol amorphous silicon - Language
- ISSN
- 2160-1968