High Quality Factor Hybrid SAW/BAW Resonators
- Resource Type
- Conference
- Source
- 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2022 Joint Conference of the. :1-4 Apr, 2022
- Subject
Aerospace Fields, Waves and Electromagnetics Photonics and Electrooptics Q-factor Fabrication Time-frequency analysis Transducers Resonant frequency Silicon Resonators Hybrid SAW/BAW resonators High quality factor AlN - Language
- ISSN
- 2327-1949