High-performance navigation grade resonant beam MEMS accelerometers
- Resource Type
- Conference
- Authors
- Gurung, Lokesh; Miani, Theo; Sobreviela-Falces, Guillermo; Young, Douglas; Baker, Colin; Seshia, Ashwin
- Source
- 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2024 IEEE International Symposium on. :1-4 Mar, 2024
- Subject
- General Topics for Engineers
Temperature measurement
Accelerometers
Micromechanical devices
Vibrations
Temperature distribution
Navigation
Dynamic range
MEMS
accelerometer
inertial sensor
resonant
sensor
bias
scale factor
high-performance
navigation
VBA
- Language
- ISSN
- 2377-3480
This paper reports results obtained from two high-performance navigation grade resonant microelectromechanical systems (MEMS) accelerometer: one with a ±25g dynamic range ("RXL25") and the other with a ±100g dynamic range ("RXL100") demonstrating bias errors of 4 μg and 25 μg respectively over an operational temperature range of -40° to 80°C. The total scale factor (SF) residual errors for both accelerometers over temperature are reported to be less than 2 ppm. The bias instability (BI) and velocity random walk (VRW) of RXL25 are measured to be 0.086 μg and 0.40 $\mu {\text{g}}/\sqrt {{\text{Hz}}} $ respectively. The RXL100 accelerometer yields a BI and VRW of 0.34 μg and 0.91 $\mu {\text{g}}/\sqrt {{\text{Hz}}} $ respectively. The vibration rectification coefficient (VRC) for RXL25 is reported to be less than 10 μg/g 2 .