Finite element analysis of a lateral microelectro-thermal actuator
- Resource Type
- Conference
- Authors
- Aziz, A. A.; Rahman, M. S.; Aris, Hasnizah
- Source
- 2011 IEEE Regional Symposium on Micro and Nano Electronics Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on. :354-358 Sep, 2011
- Subject
- Components, Circuits, Devices and Systems
Communication, Networking and Broadcast Technologies
Computing and Processing
Actuators
Heating
Finite element methods
Gold
Solid modeling
Electric potential
Shape
- Language
This paper reports on research that designed, and characterized a lateral microelectro-thermal actuator using ANSYS in order to simulate. The aim of this study is mainly to compute and compare the blade tip displacement of the different materials at the same operation conditions when potential difference is applied across the electrical connection pads, resulting the total current and heat flow distributions all over the microelectro-thermal actuator.