Fiber-optic Michelson Interferometer Sensor Fabricated by Femtosecond Lasers
- Resource Type
- article
- Authors
- Dong LIU; Ying XIE; Gui XIN; Zheng-Ying LI
- Source
- Sensors & Transducers, Vol 160, Iss 12, Pp 215-219 (2013)
- Subject
- Optic fiber sensor
Femtosecond laser
Fiber-optic Michelson Interferometer temperature sensor
Temperature sensing
Frequency estimation
Technology (General)
T1-995
- Language
- English
- ISSN
- 2306-8515
1726-5479
The femtosecond laser is widely applied in all kinds of laser micro machining technology with its short pulse duration, high peak power, high machining accuracy and low damage threshold. A fiber optic Michelson interferometer cavity is presented by using femtosecond laser micromachining technology. The cavity has good shape of interference fringes and high contrast which is up to 15 dB. A demodulation algorithm is proposed to calculate the cavity length with high resolution. The temperature experiment shows that the interferometer cavity has sensitivity of 0.00428 ?m/ C with good linearity. In addition, the micro fiber Michelson sensor is resistant to high temperature and great potential for application in harsh environments.