AACVD方法制备FTO薄膜及其结构与光电性能研究 / Study on structure, optical and electrical properties of FTO thin films prepared by aerosol-assisted chemical vapor deposition
- Resource Type
- Academic Journal
- Source
- 燕山大学学报 / Journal of Yanshan University. 42(3):234-239
- Subject
气溶胶辅助 化学气相沉积 FTO薄膜 低辐射性能 - Language
- Chinese
- ISSN
- 1007-791X