柔性MEMS流速传感器的测控电路设计与实验 / Design and Experiment of Measurement and Control Circuits for Flexible MEMS Flow Sensor
- Resource Type
- Academic Journal
- Source
- 仪表技术与传感器 / Instrument Technique and Sensor. (11):7-17
- Subject
柔性MEMS 流速传感器 双惠斯登电桥 温度补偿 - Language
- Chinese
- ISSN
- 1002-1841