声表面波传感器可以实现无线无源工作,该特性使其在高速旋转部件测试中有重要的应用前景.利用硅酸镓镧压电晶体设计并制备了谐振型SAW传感器,研究了其应变敏感特性,并成功应用于转子叶片应变的无线测试试验.结果表明,所制备的SAW传感器的谐振频率为 217.794 MHz,品质因子达到5 807,应变灵敏度为-317 Hz/με.在 3 000~15 000 r/min转速下,无线测试了转子叶片应变,测试结果与电阻应变计测量结果及有限元仿真计算结果基本一致.研究结果可以为SAW传感器在高速旋转设备的无线测试工程应用提供参考.
SAW sensor can realize wireless passive operation,which makes it an important application prospect in high-speed rotating parts testing.SAW sensor was designed and fabricated with Langasite piezoelectric crystal.The strain sensitivity charac-teristics of the SAW resonator was studied and the SAW resonator was successfully applied to the wireless test of rotor blade strain.The results show that the resonance frequency of the prepared SAW sensor is 217.794 MHz and the quality factor reaches 5 807.The strain sensitivity of the SAW resonator is about-317 Hz/με.The strain of the rotator blade was measured wirelessly in the range of 3 000 to 15 000 r/min.The measurement results of SAW sensor are basically agree with that of the foil strain gauge and Finite Element Method simulation.The research results can provide references for SAW resonator's applications in wireless measurement.