优质高稳定性微晶硅薄膜的制备 / Preparation of the high-quality and stable microcrystalline silicon films
- Resource Type
- Academic Journal
- Source
- 四川大学学报(自然科学版) / Journal of Sichuan University(Natural Science Edition). 53(1):157-162
- Subject
微晶硅薄膜 光照稳定性 均匀性 PECVD Microcrystalline silicon film Stability of light soaking Uniformity - Language
- Chinese
- ISSN
- 0490-6756