基于电感耦合等离子体刻蚀的LNOI脊形微结构制备 / Fabrication of LNOI Ridge Microstructure Based on Inductively Coupled Plasma Etching
- Resource Type
- Academic Journal
- Source
- 压电与声光 / Piezoelectrics & Acoustooptics. 45(2):239-242
- Subject
绝缘体上铌酸锂薄膜(LNOI) 集成光子学 脊形结构 电感耦合等离子体刻蚀 微结构参数 - Language
- Chinese
- ISSN
- 1004-2474