SiC外延炉加热系统的设计 / The Design of the Heating System of Chemical Vapor Deposition for Silicon Carbide Epitaxy
- Resource Type
- Academic Journal
- Source
- 电子工业专用设备 / Equipment for Electronic Products Manufacturing. 46(1):4-34
- Subject
碳化硅 外延生长 加热器 线圈 温度曲线 - Language
- Chinese
- ISSN
- 1004-4507