Micro-LED巨量转移装备核心轴具有多变量、强耦合、非线性以及容易受到参数摄动影响等特点,较难实现系统的高精度定位和快速响应.以基于永磁同步直线电机(PMSLM)的巨量转移装备X轴伺服系统为研究对象,提出了一种结合非线性函数和幂指数超螺旋切换控制律的自适应反步超螺旋滑模控制(ABSTASMC)算法,提高系统抗参数摄动能力,降低固有抖振,同时辅以前馈控制器,实现系统的快速响应.实验结果表明,相比传统的PID控制,ABSTASMC拥有更高的定位精度和更强的鲁棒性,调整时间更短,很好满足了巨量转移装备核心轴对高加速高精度运动性能的要求.
The core axis of Micro-LED mass transfer equipment has the characteristics of multivariation,strong coupling,nonlinearity and easy to be affected by parameter perturbation,which is difficult to realize the high precision and fast response of system.Taking X-axis servo system of mass transfer equipment based on permanent synchronous linear motor(PMSLM)as the research object,an self-adaptive backstepping super-twisting sliding mode control(ABSTASMC)algorithm combining nonlinear function and power exponential super-twisting control law is proposed to improve the anti-parameter perturbation ability of the system,reduce the inherent jitter.Moreover,a feed-forward controller is supplemented to achieve the fast response of the sys-tem.The experimental results show that,compared with PID control,the ABSTASMC has higher positioning accuracy and stronger robustness,and the adjustment time is shorter.It can well meet the requirements of the core axis of the mass transfer equipment for high acceleration and high precision motion performance.