面向极端环境下压阻式加速度传感器的冲击动力学响应特性分析的需求,对其封装体结构建立多自由度动力学响应模型,利用矢量法并结合MATLAB软件进行数值求解,获得其敏感结构位移响应曲线,与霍普金森杆实测结果对比,表明该响应模型可有效表征受迫振动中加速度传感器敏感结构的动力学响应过程,为MEMS高量程加速度传感器的优化设计提供理论参考.
In order to analyze the impact dynamic response characteristics of the piezoresistive acceleration sensor in extreme environment,the multi-degree of freedom dynamic response model of the package structure is estab-lished.The vector method and MATLAB software are used to solve the numerical solution,and the displacement response curve of the sensitive structure is obtained,which is compared with the measured results of the Hopkin-son bar.The results show that the response model can effectively characterize the dynamic response process of the sensitive structure of the acceleration sensor in the forced vibration,and provide theoretical reference for the optimal design of MEMS high range acceleration sensor.