集成电路工艺用过氧化氢中杂质元素的检测方法 / Detection of impurity elements in hydrogen peroxide for integrated circuit processing
- Resource Type
- Academic Journal
- Source
- 上海计量测试 / Shanghai Measurement and Testing. 46(4):2-14
- Subject
电子级 过氧化氢 高分辨质谱 - Language
- Chinese
- ISSN
- 1673-2235