针对温度波动对生物传感器探测性能的影响,本文提出了一种三环型波导微环谐振器无热化生物传感器。传感器芯片以3个微环谐振器为一个传感单元,3个微环谐振器并联排列,且分别工作在1500、1550和1580 nm波长,以其中两个为基本探测微环,另外一个作为备用微环。由于3个微环工作波长不同,可通过运算消去温度对探测谱线变化值的影响项,从而实现传感器的无热化探测。相对于传统的无热化方案,本方案制备材料不受限,且无需参考微环,不存在浪费面积,集成度更高。另外备用微环的设计可以防止部分微环工作失常时传感器无法工作情况的发生,提高了系统的稳定性及可靠性。
Considering the influence of the temperature fluctuation on the detection performance of the biosen -sor , the athermal biosensor based on three waveguide micro-ring resonators is proposed in this paper .The res-onant wavelengths of the three parallel rings are 1 500 nm, 1 550 nm and 1 580 nm respectively .Two of the rings are utilized as the sensing resonator , and the other one is used as the alternate resonator .Because the resonant wavelengths of the three rings are different , the temperature influence term can be eliminated through computation , and as a result , the athermal bio-sensing is realized .Compared to the existing method , the scheme we proposed shows the following advantages:the unlimited use of the fabricated material , a higher inte-gration level and a higher stability due to the introduction of the standby micro-rings which can avoid the case that the biosensor can not work when partial micro-rings work under a disorder .