基于卷积神经网络判定方法的激光微透镜阵列微米级加工工艺 / Micron-level processing technology of microlens array (MLA) photolithography based on convolutional neural network
- Resource Type
- Academic Journal
- Source
- 光学精密工程 / Optics and Precision Engineering. 32(1):43-52
- Subject
无掩膜光刻 微透镜阵列 曝光合格率 目标检测 maskless lithogrophy microlens array qualification rate object detection - Language
- Chinese
- ISSN
- 1004-924X