在使用半导体应变片式高灵敏度力传感器过程中发现,光照条件下传感器输出结果存在明显的漂移现象,且在光强发生改变时,传感器的输出电压会发生大幅度的跳动,需要一段时间才能平衡.输出电压与导电性能有关,取决于半导体应变片内载流子的变化,针对此问题,采用不同强度激光照射传感器半导体应变片的试验方法,研究光电效应对半导体应变片内载流子的影响,并探究最终输出电压平衡问题.研究结果发现,在一定光照下,输出电压平衡时间最快为2.2 so试验结果有望推动光电调零的应用.
In the process of using a semiconductor strain gauge type high-sensitivity force sensor,it is found that the output results of the sensor under lighting conditions present an obvious drift,and when the light intensity changes,the output voltage of the sensor experiences a large fluctua-tion,which takes a period to balance.The output voltage is related to the conductivity and depends on the change of carriers in the semiconductor strain gauge.To address this problem,a test method of irradiat-ing the semiconductor strain gauge of the sensor with different intensities of laser is adopted to study the influence of the pho-toelectric effect on the carriers in the semi-conductor strain gauge and to explore the final output voltage balance problem.The research results show that,under a certain illumination,the fastest time for output voltage balance is 2.2 s.The test results are expected to promote the application of photoelectric zeroing.