不同调制周期的TiSiN/TaVN纳米多层膜的结构及性能 / Microstructure and Properties of TiSiN/TaVN Nanomultilayers with Different Modulation Periods
- Resource Type
- Academic Journal
- Source
- 材料导报 / Materials Reports. 36(z2):58-62
- Subject
磁控溅射 TiSiN/TaVN 纳米多层膜 微观结构 力学性能 摩擦学性能 - Language
- Chinese
- ISSN
- 1005-023X