CO gas response of ZnO nanostructures using microcantilever in dynamic mode operation
- Resource Type
- Authors
- Lia Aprilia; Dwi Gustiono; Brian Yuliarto; Ratno Nuryadi
- Source
- 2016 IEEE International Nanoelectronics Conference (INEC).
- Subject
- Reproducibility
Materials science
Nanostructure
business.industry
Analytical chemistry
Crystal growth
02 engineering and technology
010402 general chemistry
021001 nanoscience & nanotechnology
01 natural sciences
0104 chemical sciences
Vibration
chemistry.chemical_compound
chemistry
Optoelectronics
Molecule
Nanorod
0210 nano-technology
business
Layer (electronics)
Carbon monoxide
- Language
We present a carbon monoxide (CO) gas response of nanostructured ZnO sensitive layer formed on a microcantilever. The ZnO nanostructures (nanorods) were prepared by a crystal growth method, and coated on microcantilever surface. The response of gas is indicated by increasing resonance frequency of microcantilever vibration in dynamic mode operation, where the gas molecules are detected in picogram level. The experimental result shows the consistent sensing behavior, indicating good sensing performance with good repeatablility and reproducibility.