Uniform large-area slot-die coating of soluble metal oxide semiconductor towards mass production of high-performance TFT backplanes
- Resource Type
- Authors
- van der Steen, Jan Laurens; Gelinck, Gerwin; Takata, Ryo; Marinkovic, Marko; Neumann, Anita; Pham, Duy Vu; Anselmann, Ralf; Ke, Tung Huei; Smout, Steve; Schols, Sarah
- Source
- 23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016, 2, 844-847
- Subject
- Olution processable
Metal oxide semiconductor
Mass production
Slot-die coating
Amoled display
- Language
- English
ESL TFT backplane with solution type metal oxide semiconductor was completely processed on mass-production ready equipment. High mobility TFTs with excellent uniformity were obtained over the complete Gen1 glass substrate (320 mm x 352 mm), with good TFT bias stress reliability. An 85 ppi QVGA AMOLED display is demonstrated.