Top-down convergence of near-infrared photonics with silicon substrate-integrated electronics
- Resource Type
- Authors
- Mher Ghulinyan; Giovanni Paternoster; Davide Brunelli; Gioele Piccoli; Luca Gemma; Martino Bernard; Fabio Acerbi; Lucio Pancheri; Georg Pucker; Alberto Gola
- Source
- Optica
- Subject
- Total internal reflection
Materials science
Silicon
business.industry
Photonic integrated circuit
Physics::Optics
Photodetector
chemistry.chemical_element
02 engineering and technology
Substrate (electronics)
021001 nanoscience & nanotechnology
01 natural sciences
7. Clean energy
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
010309 optics
chemistry
0103 physical sciences
Optoelectronics
Direct coupling
Quantum efficiency
Photonics
0210 nano-technology
business
- Language
- ISSN
- 2334-2536
On-chip direct coupling of dielectric waveguides to Si substrate-integrated photodetectors has been realized within a top-down approach. A first-run 44% external quantum efficiency at 850 nm is shown for an oxynitride photonic integrated circuit at room temperature.