3D force sensors for laparoscopic surgery tool
- Resource Type
- Authors
- János Radó; Gábor Szebényi; Péter Fürjes; Csaba Dücső; Kamil Rohr; Péter Földesy; Zbigniew Nawrat
- Source
- Microsystem Technologies. 24:519-525
- Subject
- Materials science
Polydimethylsiloxane
Acoustics
010401 analytical chemistry
Response time
02 engineering and technology
engineering.material
021001 nanoscience & nanotechnology
Condensed Matter Physics
Chip
01 natural sciences
Piezoresistive effect
0104 chemical sciences
Electronic, Optical and Magnetic Materials
chemistry.chemical_compound
Coating
chemistry
Hardware and Architecture
engineering
Deep reactive-ion etching
Head (vessel)
Electrical and Electronic Engineering
0210 nano-technology
Haptic technology
- Language
- ISSN
- 1432-1858
0946-7076
3D force sensors were developed and integrated in a laparoscope grasping head of the Robin Heart surgery robot to provide additional tactile and force feedback to the surgeon. The Si sensors operate with piezoresistive transduction principle by measuring the stress induced signals of the symmetrically arranged four piezoresistors in a deforming membrane. The chip size was reduced to 1 mm2 by applying deep reactive ion etching (DRIE) for membrane formation. DRIE opens the way to fabricate complex shaped membranes, thereby a monolith force transfer rod protruding over the chip surface could be integrated. This rod increases shear sensitivity of the structure and plays crucial role in tactile sensing. According to the medical and functional requirements the sensors were covered by biocompatible elastic polymer. The effect of elastic cover on the device performance was modelled by coupled finite element simulation to determine the appropriate geometric parameters. Sensors were covered with semi-sphere PDMS (polydimethylsiloxane) polymer and the effect of the elastic coating was studied in terms of sensitivity and response time. Preliminary test of the laparoscopic head integrated in the Robin Heart surgery robot was performed.