Investigation on Material Removal Uniformity in Electrochemical Mechanical Polishing by Polishing Pad with Holes
- Resource Type
- Source
- ECS Journal of Solid State Science and Technology. 8:P3047-P3052
- Subject
Materials science Metallurgy Polishing Material removal Electrochemistry Electronic, Optical and Magnetic Materials - Language
- ISSN
- 2162-8777
2162-8769