An Efficient Scheduling Method for Single-Arm Cluster Tools With Multifunctional Process Modules
- Resource Type
- Source
- IEEE Transactions on Systems, Man, and Cybernetics: Systems. 53:3270-3283
- Subject
Human-Computer Interaction Control and Systems Engineering Electrical and Electronic Engineering Software Computer Science Applications - Language
- ISSN
- 2168-2232
2168-2216