Low roughness surface of the aspheric fused silica substrate in the EUV by ion beam figuring
- Resource Type
- Authors
- Weichen Gu; Pengfeng Sheng; Jiali Wu; Runze Qi; Jun Yu
- Source
- Optical Interference Coatings Conference (OIC) 2022.
- Subject
- Language
In order to provide a high-quality substrate for coating, through ion beam processing, the surface shape of the substrate surface meets the requirements, and the roughness is optimized.