Demonstration of new planar capacitor (PCAP) vehicles to evaluate dielectrics and metal barrier thin films
- Resource Type
- Source
- 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM).
- Subject
Materials science Dielectric strength business.industry Electrical engineering Hardware_PERFORMANCEANDRELIABILITY Dielectric Planar capacitor law.invention Metal Capacitor Film capacitor Planar Hardware_GENERAL law visual_art Hardware_INTEGRATEDCIRCUITS visual_art.visual_art_medium Optoelectronics Thin film business - Language