Application of high-κ gate dielectrics and metal gate electrodes to enable silicon and non-silicon logic nanotechnology
- Resource Type
- Source
- Microelectronic Engineering. 80:1-6
- Subject
Materials science Silicon Gate dielectric Transistor chemistry.chemical_element Nanotechnology Time-dependent gate oxide breakdown Hardware_PERFORMANCEANDRELIABILITY Condensed Matter Physics Atomic and Molecular Physics, and Optics Surfaces, Coatings and Films Electronic, Optical and Magnetic Materials law.invention chemistry Hardware_GENERAL Gate oxide law Hardware_INTEGRATEDCIRCUITS Hardware_ARITHMETICANDLOGICSTRUCTURES Electrical and Electronic Engineering Metal gate Gate equivalent Hardware_LOGICDESIGN High-κ dielectric - Language
- ISSN
- 0167-9317