Monolithic Integration of Micro-Channel on Disposable Flow Sensors for Medical Applications
- Resource Type
- Authors
- Sophie Billat; Frank Hedrich; K. Kliche; P. Nommensen; R. Gronmaier; Roland Zengerle; J. Auber
- Source
- TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
- Subject
- Engineering
Materials science
Polydimethylsiloxane
business.industry
Flow (psychology)
Metals and Alloys
Condensed Matter Physics
Chip
Die (integrated circuit)
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Volumetric flow rate
chemistry.chemical_compound
Flow (mathematics)
chemistry
Etching (microfabrication)
Electronic engineering
Optoelectronics
Sensitivity (control systems)
Electrical and Electronic Engineering
business
Instrumentation
Communication channel
- Language
We report on the integration of a micro-flow channel with a thermal flow sensor chip. Two different technologies were investigated: first the fluid channel is performed at the back side of the standard HSG-IMIT flow sensor chip using a double KOH etching process (DKOH). The second technology consists of a bond process between the flow sensor die and a polydimethylsiloxane (PDMS) sheet containing the channel. Both sensor types can be used for detecting flow rates in the range of 0.1–5.0 μl/min (H2O) and/or pressure differences of 10–600 Pa. Compared to our previous sensor design this leads to reduced packaging costs, increased reproducibility (better than 1%) and in particular a higher sensitivity at low flow rates. Finally a concept of an adhesive-free packaging of the sensor is presented.