The Integration and Application of Machine Vision by Using Ultra-low Alignment Stage
- Resource Type
- Authors
- Chorng-Tyan Lin; Hui-Hung Lin; Shi-Wei Lin; Chun-Ming Yang; Jwu-jiun Yang; Chih-Chin Wen
- Source
- RVSP
- Subject
- business.industry
Machine vision
Computer science
Template matching
ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION
Motion control
Flat panel display
law.invention
law
Trajectory
System integration
Computer vision
Artificial intelligence
Stage (hydrology)
business
Fiducial marker
- Language
Integrating machine vision and motion control method into a double layers alignment system is a popular issue in flat panel display and semiconductor industry. An ultra-low stage is considered to compensate the posture between the upper and nether misalignment. Classic template matching is introduced in this paper to recognize the fiducial marks in this proposed alignment system. The compensate variables with the vision posture are integrated to implement the alignment system using an ultra-low stage. Experimental results are shown to demonstrate the feasibility of this system.