200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules
- Resource Type
- Source
- 2013 IEEE International Electron Devices Meeting.
- Subject
Materials science Wafer-scale integration Silicon technology, industry, and agriculture chemistry.chemical_element Nanofluidics Nanotechnology Lab-on-a-chip law.invention chemistry.chemical_compound chemistry Optical microscope law Fluorescence microscope Molecule DNA - Language