Ordered Si Micropillar Arrays via Carbon-Nanotube-Assisted Chemical Etching for Applications Requiring Nonreflective Embedded Contacts
- Resource Type
- Source
- ACS Applied Nano Materials. 2:7819-7826
- Subject
Materials science Semiconductor device fabrication law General Materials Science Nanotechnology Dry etching Carbon nanotube Isotropic etching law.invention - Language
- ISSN
- 2574-0970