Lithographic positioning, areal density increase and fluid transport in rolled-up nanotubes
- Resource Type
- Authors
- Ch. Deneke; Oliver G. Schmidt
- Source
- Physica E: Low-dimensional Systems and Nanostructures. 23:269-273
- Subject
- Materials science
business.industry
Video microscopy
Edge (geometry)
Condensed Matter Physics
Fluid transport
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
law.invention
Optics
Stack (abstract data type)
Etching (microfabrication)
law
Optoelectronics
Area density
Photolithography
business
Lithography
- Language
- ISSN
- 1386-9477
We study the formation process of rolled-up InAs/GaAs nanotubes (RUNTs) as a function of etching time and sacrificial layer thickness for tube diameters between 20 and 560 nm . Within this diameter range the roll-up velocity strongly depends on the sacrificial layer thickness but is independent of the tube diameter. We also find that the roll-up distance saturates with etching time for distances around 8– 16 μm . Since we define the starting edge of the roll-up process by optical lithography, we are able to position individual RUNTs on a substrate surface with reasonable accuracy. We also show that the areal density of the tubes on a surface can be doubled if a two-fold stack of strained bilayers is selectively underetched. Finally, we record organic fluid transport within a RUNT in real time and we report intense red light emission from such filled-up nanotubes.