Hybrid metrology (HM) is the practice of combining measurements from multiple toolset types in order to enable or improve metrology for advanced structures. HM is implemented in two phases: Phase-1 includes readiness of the infrastructure to transfer processed data from the first toolset to the second. Phase-2 infrastructure allows simultaneous transfer and optimization of raw data between toolsets such as spectra, images, traces – co-optimization. We discuss the extension of Phase-1 to include direct high-bandwidth communication between toolsets using a hybrid server, enabling seamless fab deployment and further laying the groundwork for Phase-2 high volume manufacturing (HVM) implementation. An example of the communication protocol shows the information that can be used by the hybrid server, differentiating its capabilities from that of a host-based approach. We demonstrate qualification and production implementation of the hybrid server approach using CD-SEM and OCD toolsets for complex 20nm and 14nm applications. Finally we discuss the roadmap for Phase-2 HM implementation through use of the hybrid server.