Deposition and Characterization of Al2O3 and BiFeO3 Thin Films on Titanium Substrates for Tough MEMS Devices
- Resource Type
- Authors
- Masayuki Sohgawa; Takeshi Kohno; Masanori Okuyama; Takashi Abe; Ataru Tanabe; Masato Mihara
- Source
- IEEJ Transactions on Sensors and Micromachines. 137:46-47
- Subject
- 010302 applied physics
Microelectromechanical systems
Engineering
business.industry
Mechanical Engineering
chemistry.chemical_element
Nanotechnology
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Characterization (materials science)
chemistry
0103 physical sciences
Deposition (phase transition)
Electrical and Electronic Engineering
Thin film
0210 nano-technology
business
Titanium
- Language
- ISSN
- 1347-5525
1341-8939