Black border, mask 3D effects: covering challenges of EUV mask architecture for 22nm node and beyond
- Resource Type
- Article
- Authors
- Behringer, Uwe F. W.; Davydova, Natalia; van Setten, Eelco; de Kruif, Robert; Connolly, Brid; Fukugami, Norihito; Kodera, Yutaka; Morimoto, Hiroaki; Sakata, Yo; Kotani, Jun; Kondo, Shinpei; Imoto, Tomohiro; Rolff, Haiko; Ullrich, Albrecht; Jaganatharaja, Ramasubramanian Kottumakulal; Lammers, Ad; Oorschot, Dorothe; Man, Cheuk-Wah; Schiffelers, Guido; van Dijk, Joep
- Source
- Proceedings of SPIE; October 2014, Vol. 9231 Issue: 1 p923102-923102-14
- Subject
- Language
- ISSN
- 0277786X