Impact of an etched EUV mask black border on imaging: part II
- Resource Type
- Article
- Authors
- Faure, Thomas B.; Ackmann, Paul W.; Davydova, Natalia; de Kruif, Robert; Morimoto, Hiroaki; Sakata, Yo; Kotani, Jun; Fukugami, Norihito; Kondo, Shinpei; Imoto, Tomohiro; Connolly, Brid; van Gestel, Dries; Oorschot, Dorothe; Rio, David; Zimmerman, John; Harned, Noreen
- Source
- Proceedings of SPIE; September 2013, Vol. 8880 Issue: 1 p888027-888027-12
- Subject
- Language
- ISSN
- 0277786X