Enabling inspection solutions for future mask technologies through the development of massively parallel E-Beam inspection
- Resource Type
- Article
- Authors
- Behringer, Uwe F.W.; Finders, Jo; Malloy, Matt; Thiel, Brad; Bunday, Benjamin D.; Wurm, Stefan; Jindal, Vibhu; Mukhtar, Maseeh; Quoi, Kathy; Kemen, Thomas; Zeidler, Dirk; Eberle, Anna Lena; Garbowski, Tomasz; Dellemann, Gregor; Peters, Jan Hendrik
- Source
- Proceedings of SPIE; September 2015, Vol. 9661 Issue: 1 p96610O-96610O-8, 869499p
- Subject
- Language
- ISSN
- 0277786X