We conducted an investigation into the magnetization dynamics of a set of [Co60 Fe40/Pt]5 multilayers with perpendicular magnetic anisotropy prepared on different Pt buffer structures. Our results clearly demonstrated the impact of varying buffer preparations and multilayer morphology on magnetization dynamics. In addition, in cases of small damping and angle oscillations, both frequency- and time-domain approaches agree qualitatively to characterize the precession damping of the [Co60Fe40/Pt]5 multilayers.