LCDU improvement of EUV-patterned vias with DSA
- Resource Type
- Article
- Authors
- Sanchez, Martha I.; Panning, Eric M.; Guo, Jing; Janes, Dustin W.; Mignot, Yann; Johnson, Richard C.; Chi, Cheng; Liu, Chi-Chun; Meli, Luciana; Kuroda, Takuya; DiPaola, Domenico A.; Tanaka, Yuji; Masahiko, Harumoto; Felix, Nelson M.; Corliss, Daniel A.
- Source
- Proceedings of SPIE; June 2019, Vol. 10958 Issue: 1 p109580N-109580N-11, 10848432p
- Subject
- Language
- ISSN
- 0277786X