Demonstration of Sputtering Atomic Layer Augmented Deposition: Aluminum Oxide–Copper Dielectric–Metal Nanocomposite Thin Films.
- Resource Type
- Article
- Source
- ACS Applied Materials & Interfaces; 3/25/2020, Vol. 12 Issue 12, p14280-14288, 9p
- Subject
- Language
- ISSN
- 19448244