Analysis and fabrication process of an electro-magnetically actuated valveless micropump with two parallel flexible diaphragms.
- Resource Type
- Article
- Authors
- Su, Y; Chen, W; Cui, F; Zhang, W
- Source
- Proceedings of the Institution of Mechanical Engineers -- Part C -- Journal of Mechanical Engineering Science (Professional Engineering Publishing); Sep2005, Vol. 219 Issue 9, p1007-1014, 8p, 4 Diagrams, 2 Charts, 3 Graphs
- Subject
- ELECTROMAGNETISM
ELECTRIC coils
MAGNETIC fields
ELECTROPLATING
SILICON
- Language
- ISSN
- 09544062
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